SOURCE OF MULTICOMPONENT NUCLEAR FLOWS Russian patent published in 1998 - IPC

Abstract RU 2119730 C1

FIELD: electrical engineering, in particular, vacuum deposition of thin films. SUBSTANCE: device is designed as rotating plasma trap which generates multicomponent nuclear flows which consist of fast nuclei which energy is determined discharge voltage. EFFECT: increased power, simplified design, decreased cost of manufacturing and use. 2 dwg

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RU 2 119 730 C1

Authors

Volosov V.I.

Churkin I.N.

Steshov A.G.

Dates

1998-09-27—Published

1996-12-16—Filed