FIELD: optical instruments. SUBSTANCE: method involves generation of samples of waveguide elements on substrate surface by means of photolithography using inclination of samples at some angle with respect to vertical and horizontal cut lines which are located on substrate. Then method involves cutting substrate along horizontal and vertical cut lines in order to provide multiple waveguide elements. EFFECT: decreased back losses, in case if waveguide elements are connected to optical fibers. 7 cl, 5 dwg
