PROCESS OF DEPOSITION OF ANTI-REFLECTING MULTILAYER COAT ON SURFACE OF OPTICAL ELEMENT AND PLANT TO REALIZE IT Russian patent published in 1999 - IPC

FIELD: deposition of coats. SUBSTANCE: process of deposition of anti-reflecting coat includes cathode-ray evaporation of coat material in vacuum and deposition of vapors on optical element. Spectrophotometer installed in plant measures dependence of refractive index on length of wave after each pass of optical element through spraying zone. Output of spectrophotometer is connected to computer which compares measured dependence of refractive index on length of wave with specified one and generates correction signals to diminish incompatibility of dependencies. With this in mind outputs of computer are connected to devices regulating current of cathode-ray evaporators and/or value of vacuum and/or rotational speed of drive. EFFECT: increased productivity of deposition process and improved quality of deposited coats. 2 cl, 3 dwg