METHOD FOR APPLYING A MULTILAYER COATING TO OPTICAL SUBSTRATES AND AN INSTALLATION FOR IMPLEMENTING THE METHOD Russian patent published in 2022 - IPC G02B1/10 G01B11/06 C23C14/54 

FIELD: protective coatings.

SUBSTANCE: method includes sputtering, carried out by electron beam evaporation of the coating material in vacuum and vapor deposition on the substrate surface during the rotation of the substrates. The control of the deposition process by measuring the transmission spectrum of the coating is carried out by a combined broadband optical control system, which includes direct optical control carried out at each turn of the substrate around the axis of the vacuum chamber, and indirect optical control by a witness sample located at the same height as the substrate and rotating around the axis of the vacuum chamber. The radius of rotation is determined based on the fact that the witness sample passes through the optical control beam at each revolution. Measurements of the transmission spectrum of the coating of the witness sample are carried out during the spraying process at each revolution of the witness sample around the axis of the vacuum chamber.

EFFECT: increase in the accuracy of controlling the thicknesses of layers of a multilayer coating during its deposition on optical substrates, including large-sized optical substrates.

11 cl, 4 dwg