METHOD OF APPLYING MULTILAYER COATING ON OPTICAL SUBSTRATES AND APPARATUS FOR REALIZING THE METHOD Russian patent published in 2019 - IPC G02B1/10 G01B11/06 C23C14/54 

FIELD: technological processes.

SUBSTANCE: method involves sputtering of coating material in vacuum by electron-beam evaporation and deposition of vapors on surface of substrate at rotation of substrates by mechanism with planetary gear. Direct optical inspection is carried out by measuring the transmission spectrum of the coating on each turn of the substrate and indirect optical inspection on the specimen. For direct and indirect optical inspections, function value of sprayed layer discrepancy is calculated. First, direct optical inspection is carried out, wherein stopping of sputtering of each layer is performed when minimum of its discrepancy function is achieved, and after the layer on which the discrepancy function minimum value is more than 1 %, indirect optical inspection is carried out, wherein stopping of sputtering of each layer is performed when the minimum of its discrepancy function is achieved. During direct optical inspection, calibration factor value between direct and indirect optical inspections is determined, wherein the thickness of the coating of the substrate and the test specimen is determined from the transmission spectra of the coatings of the substrate and the test specimen. With indirect inspection, the thickness of each layer of the witness coating is calculated by dividing the calculated thickness of the corresponding substrate coating layer by the calibration factor.

EFFECT: high accuracy of controlling thickness of layers during application thereof.

2 cl, 5 dwg