DEVICE FOR CONTACTLESS BROADBAND OPTICAL CONTROL OF THICKNESS OF FILMS Russian patent published in 2016 - IPC G01B11/06 

FIELD: test and measurement equipment.

SUBSTANCE: invention relates to test and measurement equipment and may be used for non-contact measurement of thickness of transparent films deposited on a substrate in a vacuum. Device for non-contact optical broadband monitoring of film thickness includes a housing of vacuum chamber, a substrate holder, a source of radiation, as well as working and control samples. Device also includes a spectrometer, a lens for inputting and outputting radiation from chamber. Vacuum chamber is equipped with inlet and outlet inspection windows through which radiation passes. Substrate holder, on which there are working and control samples, is made circular planar and is placed on door of vacuum chamber, corresponding hole on holder remains empty for measuring signal intensity of light field. During rotation of substrate holder rotation drive of substrate holder generates one clock pulse in a complete revolution.

EFFECT: technical result is increased compactness, high accuracy of measurements.

1 cl, 4 dwg