FIELD: equipment used for infiltration of chemical substance gaseous phase and chemical gaseous deposition. SUBSTANCE: apparatus has hermetically sealed guiding construction positioned in furnace and hermetically sealed with respect to gas inlet device and guiding construction inlet channel. Porous structure retainer has base construction plate and upper spacer construction plate. Pack of porous structures is positioned between plates, with annular gasket being positioned between each pair of adjacent porous structures. Base plate, pack and gasket define closed cavity terminating in the vicinity of upper plate. Method involves guiding gas-reagent from gas inlet device into inlet channel of guiding construction via hermetically sealed guiding construction so that practically the whole amount of gas-reagent is introduced into guiding construction. Method and apparatus allow a lot of articles, for instance aviation brake disks, to be simultaneously processed by chemical substance gaseous phase infiltration and chemical deposition. EFFECT: increased efficiency, wider operational capabilities and enhanced reliability in operation. 66 cl, 31 dwg
Authors
Dates
2000-03-10—Published
1995-11-16—Filed