METHOD FOR CONTROL AND SIMULATION OF GAS PHASE CHEMICAL INFILTRATION FOR CARBON COMPACTION OF POROUS SUBSTRATES Russian patent published in 2009 - IPC C23C16/26 C23C16/52 G05B1/00 C04B35/83 

Abstract RU 2347009 C2

FIELD: chemistry.

SUBSTANCE: invention relates to method for control and simulation of compaction of at least one porous substrate with pyrolitic carbon by chemical gas phase infiltration. According to the method, a lot of one or several substrates to be compacted is placed into furnace, the said substrate is heated, reaction gas containing at least one carbon-source hydrocarbon is supplied to the furnace, pressure, at which reaction gas is capable to diffuse into the heated substrate pores with formation of pyrolitic carbon residue, is established in the furnace, and waste gas is released from the furnace via exhaust pipe connected to the furnace outlet. In waste gas, content of at least one substance chosen from allene, propyne and benzene is determined. According to measured content, process is controlled by setting at least one of the following parameters: flow rate of reaction gas supplied to the furnace, flow rate of at least one component of gas supplied to the furnace, time of gas transit through the furnace, substrate temperature and pressure inside the furnace. At least one of parameters is set so as to provide for almost constant measured gas content. Compaction process can be either controlled in real time or simulated.

EFFECT: possibility of real-time control and simulation of process of compaction of at least one porous substrate with pyrolitic carbon using chemical gas phase infiltration.

12 cl, 8 dwg, 8 tbl, 10 ex

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RU 2 347 009 C2

Authors

Sion Ehrik

Marker Pol'-Mari

Furne Rene

Kom Gi-Mari

Dates

2009-02-20Published

2004-04-27Filed