METHOD FOR TUNING NARROW-BAND ACOUSTIC-SURFACE- WAVE DEVICE TO CENTER FREQUENCY Russian patent published in 2000 - IPC

Abstract RU 2157587 C1

FIELD: acoustoelectronics. SUBSTANCE: method for tuning acoustic-surface-wave device using piezoelectric substrate whose effective surface carries pre-formed input and output interdigital transducers connected to measuring instrument includes irradiation of effective surface of piezoelectric substrate with argon ions from high-frequency magnetron discharge plasma at pressure of 0.8 to 1.0 MPa, high-frequency specific power of 0.05 to 0.1 W/sq.cm, and bias on substrate effective surface of -50 to -60 V. EFFECT: facilitated manufacture. 3 dwg

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RU 2 157 587 C1

Authors

Kiziitov K.M.

Zima V.N.

Dates

2000-10-10—Published

1999-06-29—Filed