FIELD: electronics, applicable in manufacture of devices on surface acoustic waves. SUBSTANCE: the method of tuning of the narrow-band device to the central frequency on surface acoustic waves with a piezoelectric backing, preliminarily formed on whose working surface are the input and output opposite- pin transducers, and connected to a measuring instrument consists in the fact that the working surface of the piezoelectric backing is treated by the method of high-frequency magnetron etching at a pressure of inert gas in the vacuum chamber equal to (1.0 to 1.5)Pa, specific high-frequency power within 0.1 to 0.15 W/sq.cm and bias voltage at the piezoelectric backing within minus 60 to 80V. EFFECT: reduced labor content in manufacture of the narrow- band device on surface acoustic waves. 2 dwg
Authors
Dates
2001-06-10—Published
1999-06-29—Filed