METHOD FOR TUNING OF NARROW-BAND DEVICE TO CENTRAL FREQUENCY ON SURFACE ACOUSTIC WAVES Russian patent published in 2001 - IPC

Abstract RU 2168849 C2

FIELD: electronics, applicable in manufacture of devices on surface acoustic waves. SUBSTANCE: the method of tuning of the narrow-band device to the central frequency on surface acoustic waves with a piezoelectric backing, preliminarily formed on whose working surface are the input and output opposite- pin transducers, and connected to a measuring instrument consists in the fact that the working surface of the piezoelectric backing is treated by the method of high-frequency magnetron etching at a pressure of inert gas in the vacuum chamber equal to (1.0 to 1.5)Pa, specific high-frequency power within 0.1 to 0.15 W/sq.cm and bias voltage at the piezoelectric backing within minus 60 to 80V. EFFECT: reduced labor content in manufacture of the narrow- band device on surface acoustic waves. 2 dwg

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RU 2 168 849 C2

Authors

Zima V.N.

Kiziitov K.M.

Dates

2001-06-10Published

1999-06-29Filed