FIELD: optoelectronic devices. SUBSTANCE: invention can be employed in manufacture of displays, light-emitting diodes and shutters of superconducting structures of type of metal-dielectric- semiconductor. Process includes magnetron spraying of target made of indium-tin alloy in atmosphere of argon and oxygen, deposition of oxide film and its annealing in high vacuum at temperature of 400 C in the course of 30.0 min as minimum. EFFECT: improved electrical characteristics of films based on indium and tin oxides, decreased labor input to process of film production.
| Title | Year | Author | Number |
|---|---|---|---|
| METHOD FOR APPLICATION OF ELECTROCONDUCTIVE COATING FOR ELECTRICALLY-HEATED ORGANIC GLASS ELEMENT | 2014 |
|
RU2564650C1 |
| PROCESS OF MANUFACTURE OF ELECTRICITY CONDUCTIVE TRANSPARENT FILMS | 1992 |
|
RU2034363C1 |
| METHOD OF PRODUCING TRANSPARENT CONDUCTING FILMS BASED ON INDUIM AND TIN OXIDES | 0 |
|
SU1499573A1 |
| METHOD OF PRODUCING NITRIDE LIGHT-EMITTING DIODE | 2013 |
|
RU2530487C1 |
| METHOD FOR CREATING TRANSPARENT CONDUCTIVE COMPOSITE NANO-COATINGS (OPTIONS) | 2016 |
|
RU2661166C2 |
| METHOD FOR TUNING NARROW-BAND ACOUSTIC-SURFACE- WAVE DEVICE TO CENTER FREQUENCY | 1999 |
|
RU2157587C1 |
| METHOD FOR TUNING OF NARROW-BAND DEVICE TO CENTRAL FREQUENCY ON SURFACE ACOUSTIC WAVES | 1999 |
|
RU2168849C2 |
| METHOD OF PRODUCTION OF THE OPTICALLY TRANSPARENT ELECTRICALLY CONDUCTING COATING AND THE ITEM WITH THIS COATING, PRODUCED BY THE INDICATED METHOD (VERSIONS) | 2005 |
|
RU2274675C1 |
| METHOD FOR APPLYING CONDUCTIVE TRANSPARENT COVER | 2003 |
|
RU2241065C2 |
| TRANSPARENT CONDUCTIVE ALLOY WHICH IS ALLOYED WITH INDIUM | 2015 |
|
RU2693982C2 |
