FIELD: microelectronics and vacuum electronics. SUBSTANCE: sensor has sensing element with contacts connected to it. Sensing element is made as one moving electrode of cold-emission diode which consists of evacuated chamber with anode and cold-emission cathode positioned in it one opposite the other. Electrode may be made in the form of flat membrane which serves as a chamber wall or in the form of rod secured at one end. EFFECT: enhanced efficiency of measurement. 12 cl, 5 dwg
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