GEAR TO TAKE OFF CHAMFER IN PROCESS OF FINISHING TREATMENT OF SEMICONDUCTOR PLATE Russian patent published in 2001 - IPC

FIELD: manufacture of semiconductor devices, mechanical engineering. SUBSTANCE: case of gear to take off chamfer has central ( cylindrical ) and peripheral ( ring ) pneumatic chambers separated by cylindrical partition communicating with compressed air line. Rotation drive of plate is manufactured in the form of truncated conical socket whose smaller base has central hole. Tilted nozzles are guided along tangents to circumference concentric on base of truncated conical socket and joined correspondingly to central and peripheral pneumatic chambers located under base of truncated conical socket which is linked to bigger base with conical sector located above truncated conical socket. Polishing side surfaces of truncated conical socket and conical sector are made of abrasive material. Angles of inclination, heights, diameters of bigger and smaller bases are equal. Case of gear has inclination angles of 10-45 degrees towards conical sector. Transmitter of rotational velocity of plate is installed in base of truncated conical socket. EFFECT: increased output of good articles, decreased cost of finishing treatment, reduced time of auxiliary operations. 1 cl, 3 dwg