DEVICE WHICH DIRECTS PLATES Russian patent published in 1997 - IPC

Abstract RU 2098888 C1

FIELD: semiconductor instruments, mechanical engineering. SUBSTANCE: device has stage with inclined nozzles which generate air layer, clippers, position detectors. Clippers are designed as clipping socket. Inclined nozzles are arranged in circle and are directed to opposite directions in alternating order. EFFECT: increased functional capabilities. 4 dwg

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RU 2 098 888 C1

Authors

Abramov G.V.

Bitjukov V.K.

Nazina L.I.

Popov G.V.

Dates

1997-12-10Published

1996-07-22Filed