DEVICE FOR ORIENTATION OF PLATES Russian patent published in 1997 - IPC

FIELD: manufacture of semiconductor devices, mechanical engineering. SUBSTANCE: device for orientation of plate has table with several inclined and one vertical nozzles and limiters. Limiters are manufactured in the form of truncated polygonal pyramid which lower base is smallest of polygons. All faces of truncated pyramid with the exception of last one form regular pyramid and last face is displaced so that corresponding side of polygon is moved to center of polygon by value equal to arrow of chord of base section. Inclined nozzles are placed regularly over circumference and vertical nozzle is positioned in symmetry plane of displaced face at some distance from center equal to radius of plate minus half-value of arrow of chord of base section. In addition table carries end position sensors. EFFECT: expanded application field, improved functional efficiency and reliability. 2 dwg