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2 131 155

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IPC

(21) (22)

Application

97120773/25, 1997-12-15

(22)

Actual filing date

1997-12-15

(45)

Published

1999-05-27

(72)

Inventor

Abramov G.V.Bitjukov V.K.Nazina L.I.Popov G.V.

(73)

Holder

Voronezhskaja Gosudarstvennaja Tekhnologicheskaja Akademija

PLATE POSITIONING DEVICE Russian patent published in 1999 - IPC

Abstract RU 2131155 C1

FIELD: semiconductor plate manufacture; mechanical engineering. SUBSTANCE: device has desk with inclined nozzles and one vertical nozzle to organize air space and limiters in the form of conical seats. Inclined nozzles are uniformly distributed over circumference and alternately inclined in different directions; vertical nozzle is mounted in center of device. In addition, plate-position sensors are provided. EFFECT: improved yield and precision of positioning. 2 dwg

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RU 2 131 155 C1

Authors

Abramov G.V.

Bitjukov V.K.

Nazina L.I.

Popov G.V.

Dates

1999-05-27—Published

1997-12-15—Filed

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