METHOD OF MANUFACTURING THIN-FILM SENSOR FOR ASSESSMENT OF AMMONIA IN GAS MEDIUM Russian patent published in 2001 - IPC

Abstract RU 2172951 C1

FIELD: analytical methods. SUBSTANCE: gas-sensitive layer of chemically purified copper phthalocyanine no thicker than 20 nm is applied on substrate with electrodes at temperature 195-205 C and then subjected to alloying with oxygen in low vacuum. EFFECT: increased sensitivity and reduced use of materials for manufacturing sensor. 3 dwg, 1 tbl

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RU 2 172 951 C1

Authors

Vasil'Eva N.A.

Fedorov M.I.

Nemirovskij A.E.

Dates

2001-08-27Published

2000-04-18Filed