FIELD: analytical methods. SUBSTANCE: gas-sensitive layer of chemically purified copper phthalocyanine no thicker than 20 nm is applied on substrate with electrodes at temperature 195-205 C and then subjected to alloying with oxygen in low vacuum. EFFECT: increased sensitivity and reduced use of materials for manufacturing sensor. 3 dwg, 1 tbl
Title | Year | Author | Number |
---|---|---|---|
METHOD OF MANUFACTURE OF THIN-FILM SENSOR FOR DETERMINATION OF CONCENTRATION OF METHANE IN GAS MIXTURE | 2002 |
|
RU2231052C1 |
PROCESS OF MANUFACTURE OF THIN-FILM PICKUP FOR ANALYSIS OF AMMONIA IN GAS ATMOSPHERE | 1994 |
|
RU2080590C1 |
METHOD OF MANUFACTURE OF SENSOR FOR ANALYSIS OF HYDROGEN SULFIDE IN GAS MIXTURE | 2002 |
|
RU2231053C1 |
METHOD FOR MANUFACTURING SOLID-STATE PHOTOVOLTAIC CELL FOR LIGHT-TO-ELECTRICAL ENERGY CONVERSION | 2000 |
|
RU2170994C1 |
METHOD FOR MANUFACTURING SOLID-BODIED PHOTO-GALVANIC ELEMENT WITH p-i-n STRUCTURE | 2005 |
|
RU2282272C1 |
DIELECTRIC GAS SENSOR | 2021 |
|
RU2779966C1 |
SENSOR BASED ON TWO-DIMENSIONAL QUANTUM STRUCTURE | 2023 |
|
RU2814091C1 |
PROCESS OF MANUFACTURE OF ULTRA-VIOLET CONVERTER | 1992 |
|
RU2034372C1 |
Gas sensor and gas analysis multisensor chip based on graphene functionalized with carbonyl groups | 2020 |
|
RU2745636C1 |
METHOD OF MANUFACTURING A CHEMORESISTOR BASED ON THE NANOSTRUCTURES OF NICKEL OXIDE BY ELECTROCHEMICAL METHOD | 2018 |
|
RU2682575C1 |
Authors
Dates
2001-08-27—Published
2000-04-18—Filed