FIELD: semiconductor sensory engineering.
SUBSTANCE: proposed method includes applying gas sensitive layer of chemically pure magnesium phthalocyanine no more than 15 nm in thickness on substrate made from devitrified glass and provided with raster electrodes made from anti-corrosive alloy; this layer is subjected to technological activation and alloying by air oxygen.
EFFECT: facilitated procedure; low cost.
3 dwg, 1 tbl
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Authors
Dates
2004-06-20—Published
2002-10-07—Filed