METHOD OF MANUFACTURE OF THIN-FILM SENSOR FOR DETERMINATION OF CONCENTRATION OF METHANE IN GAS MIXTURE Russian patent published in 2004 - IPC

Abstract RU 2231052 C1

FIELD: semiconductor sensory engineering.

SUBSTANCE: proposed method includes applying gas sensitive layer of chemically pure magnesium phthalocyanine no more than 15 nm in thickness on substrate made from devitrified glass and provided with raster electrodes made from anti-corrosive alloy; this layer is subjected to technological activation and alloying by air oxygen.

EFFECT: facilitated procedure; low cost.

3 dwg, 1 tbl

Similar patents RU2231052C1

Title Year Author Number
PROCESS OF MANUFACTURE OF THIN-FILM PICKUP FOR ANALYSIS OF AMMONIA IN GAS ATMOSPHERE 1994
  • Fedorov M.I.
  • Shorin V.A.
  • Maksimov V.K.
  • Kornejchuk S.K.
RU2080590C1
METHOD OF MANUFACTURING THIN-FILM SENSOR FOR ASSESSMENT OF AMMONIA IN GAS MEDIUM 2000
  • Vasil'Eva N.A.
  • Fedorov M.I.
  • Nemirovskij A.E.
RU2172951C1
SENSOR BASED ON TWO-DIMENSIONAL QUANTUM STRUCTURE 2023
  • Lachinov Aleksei Nikolaevich
  • Lachinov Aleksei Alekseevich
RU2814091C1
DIELECTRIC GAS SENSOR 2021
  • Lachinov Aleksej Nikolaevich
  • Lachinov Aleksej Alekseevich
RU2779966C1
METHOD OF MANUFACTURE OF SENSOR FOR ANALYSIS OF HYDROGEN SULFIDE IN GAS MIXTURE 2002
  • Fedorov M.I.
  • Babkin A.N.
RU2231053C1
THIN FILM ORGANIC METHANE SENSOR 2023
  • Salikhov Renat Baiazitovich
  • Safargalin Idris Narisovich
  • Mullagaliev Ilnur Nailevich
  • Salikhov Timur Renatovich
RU2809979C1
METHOD FOR MANUFACTURING SOLID-BODIED PHOTO-GALVANIC ELEMENT WITH p-i-n STRUCTURE 2005
  • Smirnova Ol'Ga Jur'Evna
  • Fedorov Mikhail Ivanovich
RU2282272C1
METHOD FOR MANUFACTURING SOLID-STATE PHOTOVOLTAIC CELL FOR LIGHT-TO-ELECTRICAL ENERGY CONVERSION 2000
  • Fedorov M.I.
  • Smirnova M.N.
  • Karelin S.V.
RU2170994C1
PROCESS OF MANUFACTURE OF ULTRA-VIOLET CONVERTER 1992
  • Fedorov M.I.
  • Shorin V.A.
  • Maslenikov S.V.
  • Kornejchuk S.K.
RU2034372C1
GASEOUS AMMONIA SENSOR AND METHOD OF ITS MANUFACTURE BY MEANS OF METALLOCOMPLEXES OF PORHYRINS 1996
  • Maslov L.P.
  • Rumjantseva V.D.
  • Mironov A.F.
RU2172486C2

RU 2 231 052 C1

Authors

Udaratin A.V.

Fedorov M.I.

Dates

2004-06-20Published

2002-10-07Filed