SEMICONDUCTOR GAS TRANSDUCER Russian patent published in 2002 - IPC

FIELD: gas analysis, detectors registering and measuring content of carbon dioxide. SUBSTANCE: characteristic feature of semiconductor gas transducer that has semiconductor base with metal electrodes deposited on its surface lies in manufacture of base from polycrystalline film of cadmium sulfide. Carbon dioxide is detected and its quantity is determined by change of conduction of semiconductor film with adsorption of carbon dioxide. EFFECT: increased sensitivity and adaptability to manufacture, reduced operational temperature. 3 dwg