FIELD: gas analysis. SUBSTANCE: gas humidity sensor has semiconductor base with metal electrodes applied on its surface. Base is made of polycrystalline film of zinc selenide alloyed by gallium arsenide. EFFECT: higher sensitivity. 3 dwg
Title | Year | Author | Number |
---|---|---|---|
PIEZORESONANT GAS HUMIDITY SENSOR | 1998 |
|
RU2141639C1 |
SENSOR OF GAS HUMIDITY | 1997 |
|
RU2125260C1 |
SENSOR OF CARBON MONOXIDE | 2000 |
|
RU2185615C2 |
GAS TRANSDUCER | 2000 |
|
RU2178558C1 |
SEMICONDUCTOR GAS ANALYSER | 2011 |
|
RU2464553C1 |
SEMICONDUCTING GAS SENSOR | 2003 |
|
RU2235316C1 |
GAS SENSOR | 2011 |
|
RU2464552C1 |
SENSOR OF CARBON MONOXIDE | 2002 |
|
RU2206083C1 |
GAS SENSOR | 2002 |
|
RU2235315C2 |
GAS HUMIDITY SENSOR | 2002 |
|
RU2212656C1 |
Authors
Dates
2001-01-10—Published
1999-03-24—Filed