FIELD: gas analysis, detectors registering and measuring content of carbon oxide. SUBSTANCE: proposed semiconductor gas sensor has semiconductor base with metal electrodes deposited on it. Base is fabricated from polycrystalline film of indium antimonide. EFFECT: increased sensitivity of sensor, improved adaptability to its fabrication, reduced working temperature. 3 dwg
Title | Year | Author | Number |
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SENSOR OF CARBON MONOXIDE | 2002 |
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SEMICONDUCTOR SENSOR OF AMMONIA TRACE SUBSTANCES | 2016 |
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NANO-SEMICONDUCTOR GAS SENSOR | 2010 |
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CARBON MONOXIDE TRANSDUCER | 2006 |
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NITROGEN DIOXIDE INDICATOR | 2004 |
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RU2274853C1 |
Authors
Dates
2003-07-27—Published
2001-08-20—Filed