TECHNIQUE OF DIFFERENTIAL-PHASE ROUGHNESS INDICATION AND DEVICE FOR ITS REALIZATION Russian patent published in 2002 - IPC

FIELD: optical measuring equipment, processes of optical roughness indication. SUBSTANCE: standard surface is scanned by light beam in advance, then tested surface is scanned by same trajectories. In this case tested and standard surfaces are scanned in sequence by two light beams divided into two paraxial rays. Data on phase difference of reflected rays are corrected on basis of data on phase difference of reflected rays and on integrated data on trajectories of scanning of standard surface. Device for realization of technique includes two acoustooptical deflectors, two generators of controlling signals per each acoustooptical deflector with common generator of reference frequency and data processing unit. EFFECT: raised accuracy of construction of image of tested surface and of determination of parameters of profile of tested surface, provision for inspection of surfaces of objects of unspecified form. 11 cl, 5 dwg _