METHOD OF MANUFACTURING SILICON-BASED PRODUCTS Russian patent published in 2002 - IPC

FIELD: alloys in electronics, optics, and computer engineering. SUBSTANCE: invention relates to silicon- based products, preferably spray targets that can be used when applying thin coatings. Melting of silicon with alloying component is effected at 1860-1980 C to form primary alloy. Remelting of this alloy to form secondary alloy is effected at temperature by 500-600 C exceeding liquidus temperature of secondary alloy. Formation of product from the latter is performed by molding. Product is cooled from pouring temperature to solidus temperature at the rate 150-300 C/min. As alloying component, one or more components are used selected from the following group: aluminum, nickel, copper, boron, iron, rare-earth metals, tungsten, molybdenum, titanium, niobium, tantalum, and chromium, which are used in amounts between 1 and 50%. Manufactured products have porosity 0.5 to 5.9%, crystalline structure with orientation of grains perpendicularly to working surface of target, and low internal stress level. EFFECT: improved consumer's quality of products. 4 cl, 8 ex