METHOD FOR EVACUATING ELECTRONIC DEVICES Russian patent published in 2002 - IPC

FIELD: electrical engineering; evacuating large electronic devices including those with field-emission cathodes. SUBSTANCE: method includes pre- evacuation of electronic device at evacuation station involving thermal degassing, pre-sealing , treatment on seasoning rig by means of electrical- discharge magnetic pump, and final sealing; in the course of pre- evacuation electronic device is filled with working gas and treated on seasoning rig at working gas pressure and in electromagnetic mode of device operation ensuring cathode heating to 0.7-1.1 of rated temperature; final sealing is effected upon repeated evacuation on evacuation station. Hydrogen containing maximum 10^-7 atom percent of oxygen is used as working gas. Working-gas pressure during treatment on seasoning rig is controlled by varying power of electrical-discharge magnetic pump. Cathode temperature is controlled during treatment on seasoning rig due to gas discharge power variation in anode-cathode by varying anode current or voltage. Final sealing of device is conducted upon treatment of the latter on seasoning rig at the same time removing electrical-discharge magnetic pump. EFFECT: enhanced yield. 5 cl