METHOD FOR MAKING METAL LAYER Russian patent published in 2002 - IPC

FIELD: manufacture of microtargets used in modern investigations related to controlled thermonuclear synthesis and to simulation of other physical processes with use of powerful lasers. SUBSTANCE: method comprises steps of vacuum deposition of metal whose density depends upon angle of incidence of metal vapor to substrate onto which metal is deposited; at process of vacuum deposition rotating substrate in such a way that to provide changing of incidence angle of metal vapor onto substrate in arbitrary spot in range from 0 until π/2. Invention offers process for manufacturing thin metal layers with density periodically changed in direction normal relative to surface. EFFECT: enlarged range of processes simulated with use of powerful lasers. 4 cl, 3 dwg, 3 ex