METHOD FOR PIERCING PRECISION HOLES BY MEANS OF LASER IRRADIATION Russian patent published in 2002 - IPC

FIELD: processes for laser working of materials in machine engineering, microelectronics and other industry branches for piercing small-diameter and large-depth holes in articles of metals, their alloys, dielectric and other materials. SUBSTANCE: method comprises steps of exciting laser irradiation in one or more active elements; modulating Q-factor of resonator; creating irradiation in the form of pulse train by means of laser shutter; eliminating influence of irradiation reflected from worked blank upon generation process; performing collimation and focusing of laser irradiation onto worked blank while controlling intensity of laser irradiation near bottom of hole; generating s- or p-polarization irradiation; directing irradiation into member that transmits it only in direction of worked blank; at controlling rate of laser irradiation increasing intensity of pulse train as deepening duct of hole. EFFECT: increased shaping factor, decreased conicity degree at piercing holes by means of laser irradiation. 1 ex, 1 tbl, 1 dwg