METHOD FOR PRODUCING POROUS INSULATING COMPOUND (ALTERNATIVES), COMPOSITE USED FOR PRODUCING POROUS INSULATING MATERIAL (ALTERNATIVES), AND SEMICONDUCTOR DEVICE Russian patent published in 2002 - IPC

FIELD: manufacture of insulating materials. SUBSTANCE: method includes following steps: production of at least one composite organic consumable material/dielectric material incorporating at least one consumable material and at least one dielectric material and removal of at least one organic consumable material from a at least one composite organic consumable material/dielectric material to form pores in at least one dielectric material. Description is also given of compound used for producing porous insulating material incorporating heat-activated pore-forming consumable material and dielectric material. As an alternative compound used for producing porous insulating material has at least one pore-forming organic consumable material and at least one dielectric material, at least one pore-forming material being of norbornene type polymer. EFFECT: reduced dielectric constant of insulating material characterized in uniform distribution of its pores having relatively equal diameter. 53 cl, 3 dwg, 1 tbl