PHOTORESIST COMPOSITION AND POLYMER Russian patent published in 2002 - IPC

Abstract RU 2194295 C2

FIELD: radiation-sensitive photoresist compositions. SUBSTANCE: photoresist composition includes photoinitiator generating acid, solvent, solving inhibitor (not necessary) and polymer containing repeating polycyclic units carrying acidic-labile groups with molecular mass from 500 to approximately 1000000 which is product of polymerization of polycyclic monomers substituted by at least one acidic-labile group and not necessarily in combination with monomer selected from group including maleic anhydride, carbon monoxide, polycyclic monomer substituted by carboxyl group, alkyl-replaced polycyclic monomer and their mixtures. Acidic photoinitiator generates acid when exposed to radiation from source forming image which decomposes side acidic-labile groups and leads to change of polarity of polymer. Polymer acquires solubility in aqueous solution of base in points exposed to radiation from source forming image. EFFECT: compatibility with general scheme of chemical amplification and transparency to short- wave radiation forming image. 35 cl, 2 tbl

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RU 2 194 295 C2

Authors

Gudol Brajen L.

Dzhajaraman Sajkumar

Roudez Larri F.

Shik Robert Eh.

Dates

2002-12-10Published

1997-03-06Filed