FIELD: semiconductor devices. SUBSTANCE: method for organizing air gaps in semiconductor structures involves filling of closed inner space of structure with material being removed, decomposition of material being removed into gaseous decay products, and their removal by diffusion through solid layer abutting against inner space. EFFECT: reduced capacitive coupling in semiconductor structures between electrical components. 40 cl, 34 dwg
| Title | Year | Author | Number |
|---|---|---|---|
| METHOD FOR PRODUCING POROUS INSULATING COMPOUND (ALTERNATIVES), COMPOSITE USED FOR PRODUCING POROUS INSULATING MATERIAL (ALTERNATIVES), AND SEMICONDUCTOR DEVICE | 1999 |
|
RU2195050C2 |
| PHOTORESIST COMPOSITION | 1998 |
|
RU2199773C2 |
| METHOD OF PREPARING POLYCYCLIC POLYMER (VERSIONS) AND METHOD OF ADDING ELECTRON- ACCEPTING LIGAND TO TERMINAL SITE OF POLYCYCLIC POLYMER | 1998 |
|
RU2199552C2 |
| PHOTORESIST COMPOSITION AND POLYMER | 1997 |
|
RU2194295C2 |
| PHOTOCHEMICALLY ACTIVE POLYMER MATERIALS | 2011 |
|
RU2592545C2 |
| COMPOSITION OF ADDITIVES AND COMPOSITION ON THE BASE OF RAW OIL, LUBRICATING OIL AND MAZUT | 1992 |
|
RU2101326C1 |
| 1-BUTENE POLYMER COMPOSITION | 2005 |
|
RU2371459C2 |
| POLYMERIC COMPOUND AND ITS APPLICATION IN PHOTOVOLTATIC DEVICES | 2013 |
|
RU2640810C2 |
| METHOD OF OLEFIN POLYMERISATION | 2006 |
|
RU2392283C2 |
| PET BOTTLES WITH A SINGLE-LAYER BARRIER TO CARBON DIOXIDE | 2012 |
|
RU2579595C2 |
