FIELD: measurement technology. SUBSTANCE: device has N optical radiation sources of different colors, N transparencies manufactured as aperiodical linear structures, N aphocal optical systems for projecting transparency image upon the surface under control, receiving objective forming pattern image produced on the object surface under control together with N additional objectives. The device also has N photorecorders for transforming images produced by the receiving objective into digital images each in its spectral bandwidth area, N digital electronic computing units for recalculating digital images into coordinate values of surface under control and electronic unit for superimposing images. N is calculated from formula N = Log2(L), where L is the number of pairs of resolution elements in photorecorder string. Each strip from illumination pattern distorted by object surface relief under control is uniquely identified that in its turn enables one to uniquely calculate relief height and the corresponding pair of coordinates. Parallel and sequential processing of images separated into N spectral bands increases control speed. EFFECT: high accuracy and reliability of control. 7 dwg
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Authors
Dates
2003-02-27—Published
2001-12-11—Filed