FIELD: measurement technology, visualization of profiles of three-dimensional objects. SUBSTANCE: proposed procedure lies in multiple formation of sounding structurized illumination on surface of tested object by illumination of surface of tested object by beam of optical radiation spatially modulated in intensity at various angles, in recording of image of structure of sounding illumination distorted by relief of surface of tested object and in determination of height of relief of surface of tested object by degree of distortion of structure of sounding illumination with the aid of electron calculator and of two other coordinates by position of distorted structure of illumination in recorded image. EFFECT: increased precision of procedure. 6 dwg
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Authors
Dates
2002-07-20—Published
2001-03-19—Filed