FIELD: physics.
SUBSTANCE: proposed method consist in repeated formation of sounding structure illumination on controlled object surface by optical radiation beam with control over beam intensity spatial modulation and sequential registration of images of sounding illumination structure distorted by object surface relief. Controlled object surface relief height is defined from the degree of aforesaid distortion, while two other coordinates are defined from position of illumination structure distortion in recorded images. Dependence of point brightness on image upon sound illumination brightness is defined for every point on recorded images by forming regular spatial modulation of optical radiation and recording the images on varying linearly the source brightness. Obtained dependence is used to define the distortion of sounding illumination structure in defining surface relief height.
EFFECT: higher accuracy and validity.
1 dwg
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Authors
Dates
2012-01-10—Published
2010-09-15—Filed