FIELD: electron guns. SUBSTANCE: device for radiating charged particles has unipolar charged-particle radiator 5. Tubular screen electrode 6 encloses radiator over periphery and is maintained during operation at same polarity as charged particles. Tubular accelerating electrode 7 is mainly disposed coaxially with respect to tubular screen electrode 6 and during operation its polarity is reverse to that of tubular screen electrode. Device functions so that charged particles escaping radiator 5 are first blurred in sideways direction outwards and then they are focused in beam 8 which is passed through tubular accelerating electrode 7. EFFECT: enhanced convergent angle of electron gun providing for resistance to spatial charge blurring at high currents. 35 cl, 29 dwg
Title | Year | Author | Number |
---|---|---|---|
PLASMA SOURCE AND METHOD FOR GENERATING CHARGED PARTICLES RAYS | 2013 |
|
RU2621323C2 |
CHARGED-PARTICLE ACCELERATOR | 1986 |
|
SU1400467A1 |
SURFACE MODIFYING METHOD | 2002 |
|
RU2268814C2 |
CHARGED PARTICLE ACCELERATOR | 1982 |
|
SU1047368A1 |
CHARGED PARTICLES DETECTOR | 0 |
|
SU1050382A1 |
PLASMA SOURCE OF CHARGED PARTICLES | 2022 |
|
RU2789276C1 |
RECUPERATOR OF ENERGY BEAM CHARGED PARTICLES | 2015 |
|
RU2625325C2 |
CHARGED PARTICLE PLASMA EMITTER | 2009 |
|
RU2408948C1 |
ACCELERATOR FOR CHARGED PARTICLES | 2011 |
|
RU2603352C2 |
CATHODE DEVICE, AN ELECTRON GUN AND A LITHOGRAPHY APPARATUS COMPRISING SUCH AN ELECTRON GUN | 2014 |
|
RU2689391C2 |
Authors
Dates
2003-03-20—Published
1998-09-24—Filed