PLASMA SOURCE AND METHOD FOR GENERATING CHARGED PARTICLES RAYS Russian patent published in 2017 - IPC H01J27/16 

FIELD: electricity.

SUBSTANCE: source comprises: the plasma chamber equipped with the inlet pipe for gas inlet and the opening for the withdrawal of the charged particles from the plasma chamber; the RF plasma generation module for generating plasma within the plasma chamber. The RF plasma generation module comprises the first and the second resonant circuits, each of which is configured to substantially the same resonance frequency. The first resonant circuit comprises the first antenna and the first, radio frequency, power source made with the possibility of actuating the first resonant circuit at a frequency substantially equal to its resonance frequency, and the second resonant circuit comprises the second antenna, wherein in the operation mode the first resonant circuit induces a radio frequency signal in the second antenna due to the presence of the resonant connection between them, wherein the second resonant circuit is made with the possibility to send the induced radio frequency signal into the plasma chamber for generating plasma therein; and the particle acceleration module for the withdrawal of the charged particles from the plasma and the acceleration of charged particles to form a beam. The particles acceleration module comprises the second power source made with the possibility to create the potential difference between the plasma chamber and the accelerating electrode, wherein the area located between the plasma chamber and the accelerating electrode forms the accelerating column. The second power supply is made with the possibility for the output of voltage, high compared to the output signal of the first, radio frequency, power supply.

EFFECT: increased stability of the electrodes operation.

72 cl, 3 dwg