CATHODE DEVICE, AN ELECTRON GUN AND A LITHOGRAPHY APPARATUS COMPRISING SUCH AN ELECTRON GUN Russian patent published in 2019 - IPC H01J3/02 

FIELD: electrical engineering.

SUBSTANCE: invention relates to a cathode device. Cathode device (20) comprises: cathode body (22) accommodating emissive surface (32) for electron emission in longitudinal direction (Z), wherein emission surface is limited by emission perimeter (35); focusing electrode (40) at least partially enveloping the cathode body in the transverse direction and comprising an electron transmission aperture (44) for focusing electrons emitted by the emission surface, wherein this aperture is limited by perimeter (45) of the aperture. Cathode body is movably arranged inside the focusing electrode at maximum transverse distance (d1) from the set position (R). Perimeter of the aperture transversely extends above the emission surface and beyond the emission perimeter by the overlapping distance (d2) which exceeds the maximum transverse distance.

EFFECT: high and stable electron emission and current density of the cathode, as well as the possibility of controlling the temperature of focusing surface 42 during operation of the cathode.

26 cl, 6 dwg