FIELD: methods of cutting friable non-metallic materials; laser cutting of glass and various monocrystals, ceramics and semiconductor materials. SUBSTANCE: proposed method includes heating of material along line of cut by means of laser beam followed by cooling the line of cut by means of cooling agent at relative motion of laser beam with cooling agent and material; for making small parts, heating is effected by at least two laser beams located on surface of material at preset distance in direction perpendicular to direction of relative motion of laser beams and material. Besides that, cutting is performed in first cycle at pitch dictated by distance between beams; subsequent cycles of cutting are performed at halved pitch. Laser beams are extended on surface of material in direction of relative motion of laser beams and material. After heating, surfaces of material are cooled by means of cooling agent. Additional action on surface of material is performed in zone of notch by at least one source of elastic waves. Elastic waves are concentrated in zone of notch along line of cut; amplitude and frequency of elastic waves are selected on the condition of depth of notch or open cutting. Action of elastic waves may be performed after completion of making notches. EFFECT: increased productivity; improved quality of material. 9 cl, 7 dwg, 2 ex
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Authors
Dates
2003-06-20—Published
2001-08-15—Filed