FIELD: material science; microelectronics and optoelectronics; manufacture of semiconductor devices. SUBSTANCE: device has laser, focusing system in the form of cylindrical lens, and specimen holder; the latter is made in the form of tuning fork whose legs carry master and metering coils connected to frequency oscillator and to frequency, respectively; frequency-meter output is connected through control unit to outputs of frequency-oscillator and laser power supply. EFFECT: reduced number (concentration) of fused sections on surface caused by laser beam. 1 cl, 1 dwg
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