FIELD: polymer materials. SUBSTANCE: film polymer is formed directly from monomer by polymerization thereof from electron beam-affected vapor phase. Process is effected pressures of monomer vapors between 1 and 30 Torr, electron beam energies between 5 and 100 kev, and electron beam current intensities between 0.5 and 20 mcA. Under these conditions, film growth velocity achieves 1-1000 nm/min with emission energy performance factor 1-5%. Method can be used in electronics and in medical engineering. EFFECT: accelerated polymerization process. 2 cl, 5 ex
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Authors
Dates
2002-10-10—Published
2000-06-19—Filed