METHOD OF APPLYING THIN POLYMER LAYERS ON SURFACE OF SOLIDS Russian patent published in 2002 - IPC

Abstract RU 2190628 C2

FIELD: polymer materials. SUBSTANCE: film polymer is formed directly from monomer by polymerization thereof from electron beam-affected vapor phase. Process is effected pressures of monomer vapors between 1 and 30 Torr, electron beam energies between 5 and 100 kev, and electron beam current intensities between 0.5 and 20 mcA. Under these conditions, film growth velocity achieves 1-1000 nm/min with emission energy performance factor 1-5%. Method can be used in electronics and in medical engineering. EFFECT: accelerated polymerization process. 2 cl, 5 ex

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RU 2 190 628 C2

Authors

Bruk M.A.

Zhikharev E.N.

Spirin A.V.

Kal'Nov V.A.

Kardash I.E.

Teleshov Eh.N.

Dates

2002-10-10Published

2000-06-19Filed