FIELD: auxiliary fixtures for electron microscope, coordinate table for operation of other devices. SUBSTANCE: positioning facility has two parallel platforms and displacement drive including two tubes placed between platforms, elastically deformed under action of pressure of energy carrier. Tubes are rectilinear tubes of oval section placed so that their longitudinal axes are parallel. Each tube is coupled to both platforms in zones of their generators lying in plane of minor axes of their cross-sections. With orientation of major axes of cross-sections of tubes in parallel to platforms drive executes vertical displacement and/or turn. With orientation of major axes of cross-sections of tubes perpendicular to platforms drive can execute horizontal displacement or rotation depending on arrangement of protrusions on platforms coupling tubes with platforms. It is also possible that drive comes in the form of three tubes which axes lie in one plane and are bent in the form of elastically deformed tube twisted around its axis. EFFECT: provision for high-precision positioning in required direction. 18 cl, 6 dwg
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Authors
Dates
2003-06-20—Published
2001-07-03—Filed