FIELD: vacuum devices for tight shutting-off of two fine-vacuum objects at pressure differential of from 10-5 to 10-7 Pa. SUBSTANCE: device includes shut-off member and drive for its motion over curvilinear trajectory in plane passing through axis of seal. Drive is made in form of tubular elastic deformation hermetic spiral member secured on mounting support and connected to fluid medium supply source. Spiral member consists of sections symmetrical relative to support are connected with shut-off member through shock absorbers at one end and with support at other end. EFFECT: simplified construction and enhanced operational reliability. 2 dwg
| Title | Year | Author | Number |
|---|---|---|---|
| VACUUM SEAL | 1997 |
|
RU2115855C1 |
| VACUUM SEAL | 1997 |
|
RU2114481C1 |
| VACUUM SEAL | 1996 |
|
RU2109196C1 |
| SEAL | 1998 |
|
RU2147349C1 |
| NORMALLY-CLOSED VALVE ON BASE OF TUBULAR FLEXIBLY DEFORMABLE MEMBER | 2002 |
|
RU2224156C1 |
| DEVICE FOR SHUTTING-OFF VACUUM SPACES | 2002 |
|
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| RECIPROCATION MECHANISM | 2002 |
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| STRAIGHT-FLOW VACUUM SEAL | 1997 |
|
RU2122672C1 |
| POSITIONING FACILITY AND DRIVE FOR ITS ROTATION | 2001 |
|
RU2206913C2 |
| DEVICE FOR LOCKING | 1998 |
|
RU2133521C1 |
