FIELD: vacuum equipment; reliable sealing of vacuum volumes. SUBSTANCE: vacuum seal includes support 1, valve 2 and hermetic elastic deformation members 3 and 4 of setting and sealing drives of valve 2 connecting them. Members are secured on support 1 for motion of valve in two mutually perpendicular directions and are connected to fluid medium supply source. Elastic deformation member 3 of valve setting drive is made in form of symmetric closed loop formed by pairs of convex and concave sections of pipes. One concave section is connected with valve through spring 7 and other concave section is connected with support. Valve axes are located on axes of symmetry of loop. EFFECT: enhanced efficiency of sealing. 5 cl, 9 dwg
Title | Year | Author | Number |
---|---|---|---|
VACUUM SEAL | 1997 |
|
RU2114481C1 |
VACUUM SEAL | 1996 |
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RU2114354C1 |
STRAIGHT-FLOW VACUUM SEAL | 1997 |
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RU2122672C1 |
GAS SOURCE FOR PNEUMATIC DRIVE | 2001 |
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RU2190124C1 |
VACUUM SEAL | 1997 |
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RU2115855C1 |
DEVICE FOR LOCKING | 1998 |
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TRAVEL DRIVE AND GRAB | 2002 |
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NORMALLY-CLOSED VALVE ON BASE OF TUBULAR FLEXIBLY DEFORMABLE MEMBER | 2002 |
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RECIPROCATION MECHANISM | 2002 |
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DEVICE FOR SHUTTING-OFF VACUUM SPACES | 2002 |
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Authors
Dates
1998-04-20—Published
1996-08-28—Filed