FIELD: testing equipment. SUBSTANCE: for realization of method establishing leaking chamber in multichamber article it is placed in vacuum chamber, air is pumped away, initial concentration of test gas corresponding to level of gas separation of unfilled article is measured. Then all chambers of articles are simultaneously filled with test gas, final concentration of test gas in vacuum chamber corresponding to leaking of filled chambers of article is measured and summary leaking of chambers of article is evaluated by change of final concentration of test gas in vacuum chamber. Total number of chambers filled with test gas is divided into two groups, test gas in pumped away from chambers of group of highest probability of presence of chambers of increased leaking, residual concentration of test gas in vacuum chamber corresponding to leaking of group of filled chambers is measured and summary leaking of each group of chambers is evaluated again by change of residual concentration of test gas of group of filled chambers. If leaking of chambers filled with test gas exceeds permissible value then group is divided into two subgroups anew, test gas is pumped away from subgroup of chambers showing presence of chambers with increased leaking with highest probability and residual concentration of test gas in vacuum chamber corresponding to leaking of subgroup of filled chambers is measured again, leaking in each subgroup of chambers is evaluated by change of residual concentration of test gas in subgroup of filled chambers in vacuum chamber utilizing principle specified above. Residual concentration of subgroup is taken as final concentration and sequence of operations for chambers filled with test gas is repeated till only one chamber of article with increased leaking is left filled with test gas. But if permissible leaking of chambers of subgroup filled again with test gas is exceeded then sequence of operations given for group of chambers filled with test gas is followed anew. EFFECT: increased productivity of test of article as whole. 3 dwg
Authors
Dates
2003-07-27—Published
2001-10-04—Filed