FIELD: manufacture of flexible members for micromechanical sensors. SUBSTANCE: proposed method involves production of flexible members from microcrystalline silicon by dimensional anisotropic etching and doping them with germanium to recover crystalline structure of material disturbed after etching impurities. EFFECT: improved quality of members due to enhanced strength and repeatability of their characteristics. 1 cl, 2 dwg _
| Title | Year | Author | Number |
|---|---|---|---|
| METHOD FOR PRODUCING FLEXIBLE MEMBER OF MICROMECHANICAL DEVICE | 2001 |
|
RU2209489C2 |
| METHOD FOR REDUCING STRESS CONCENTRATION IN MANUFACTURING PARTS OF MICRON-SIZE MECHANICAL DEVICES | 2001 |
|
RU2202137C2 |
| METHOD FOR MANUFACTURING MASK TO EVAPORATE THIN LAYERS IN MICROSTRUCTURES | 2001 |
|
RU2209488C2 |
| METHOD FOR MANUFACTURING FLEXIBLE MEMBER OF MICROMECHANICAL DEVICE | 2005 |
|
RU2300823C2 |
| MAGNETOELECTRIC FORCE CONVERTER | 2002 |
|
RU2218575C2 |
| MICROMECHANICAL PICKUP | 2003 |
|
RU2247323C1 |
| MICROMECHANICAL LINEAR ACCELERATION DETECTOR | 2004 |
|
RU2265856C1 |
| LINEAR ACCELERATION MICRO-MECHANICAL DETECTOR | 2005 |
|
RU2284528C1 |
| MICROMECHANICAL GYROSCOPE | 2001 |
|
RU2209394C2 |
| SENSITIVE ELEMENT OF INTEGRATED ACCELEROMETER | 2002 |
|
RU2231795C1 |
