MICROMECHANICAL GYROSCOPE Russian patent published in 2003 - IPC

FIELD: measuring equipment, applicable for production of gyroscopes with oscillating masses. SUBSTANCE: the micromechanical gyroscope has a sensing element installed of flexible suspensions and serving as movable electrode 9, fixed electrodes 7,8,10 located on both sides of movable electrode 9, power electrostatic transducer and a sensitive displacement transducer, including movable (9) and fixed (7,8) electrodes. The sensing element suspensions are made in the form of flat rectangular plates positioned coaxially and interconnected in a cruciform. Such an arrangement of suspensions makes it possible to reduce the influence of the cross components of the angular velocity and accelerations on the precision of measurements in the axis of sensitivity due to the increase of stiffness in the non-sensitive axes of the suspension. EFFECT: enhanced precision of measurements. 4 dwg