MICROMECHANICAL LINEAR ACCELERATION DETECTOR Russian patent published in 2005 - IPC

FIELD: measurement technology.

SUBSTANCE: detector can be used for producing micromechanical accelerometers and gyros. Detector has pendulum-type sensitive element 1 fastened to frame 3 of sensitive element by means of flexible suspensions 2. Frame 3 is fastened to base of the device by means of rests 4. The frame is made in form of meander having n curves. Internal and external curves of meander are similar and symmetrical relatively longitudinal and lateral axes of symmetry of sensitive element. Width of frame is constant. Non-stability of null is reduced due to reduction in influence of contacts stresses and hazardous effects onto flexible suspension of sensitive element at uniform deformation of the frame.

EFFECT: improved precision.

1 dwg