FIELD: measurement technology.
SUBSTANCE: sensitive element of integrated accelerometer is made of conductive monocrystlline silicon and has pendulum 3 connected by means of springy suspensions 2 with frame 1 and central anchoring support 5 joined to immobile base 6 which is linked to frame 1 with the help pg cantilever 4.
EFFECT: diminished influence of temperature stresses on zero position of pendulum.
2 dwg
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