FIELD: measurement technology, force control over sensitive masses of micromechanical pickups of type of accelerometer. SUBSTANCE: force converter incorporates pendulum unit made of single monocrystal of conductive silicon and carrying mobile element 3 on springy suspensions 7 and bearing frame 4 from which suspensions 7 go out. Frame 4 has bonding pads 6 and is divided into two parts by two slots. Hole 9 where permanent magnet 2 is placed with gap is made in center of mobile element 3. Mobile element 3 functioning as back-moving winding of converter is positioned together with magnet 2 in gap of magnetic circuit. EFFECT: simplified design and raised functional reliability of magnetoelectric force converter. 3 dwg
Title | Year | Author | Number |
---|---|---|---|
ELASTIC SUSPENSION | 2002 |
|
RU2223506C1 |
MICROMECHANICAL PICKUP | 2003 |
|
RU2247323C1 |
METHOD FOR PRODUCING FLEXIBLE MEMBER OF MICROMECHANICAL DEVICE | 2001 |
|
RU2209487C2 |
SENSITIVE ELEMENT OF MICROMECHANICAL GYROSCOPE | 2002 |
|
RU2222780C1 |
COMPENSATION PENDULUM TYPE ACCELEROMETER | 2005 |
|
RU2291450C1 |
MAGNETIC-ELECTRIC FORCE CONVERTER | 2003 |
|
RU2242011C2 |
INTEGRATED ACCELEROMETER | 2002 |
|
RU2231796C2 |
SENSITIVE ELEMENT OF INTEGRATED ACCELEROMETER | 2002 |
|
RU2231795C1 |
INTEGRAL ACCELEROMETER SENSITIVE ELEMENT | 2003 |
|
RU2246734C1 |
MICROMECHANICAL GYROSCOPE | 2001 |
|
RU2209394C2 |
Authors
Dates
2003-12-10—Published
2002-04-24—Filed