FACILITY FOR DEPOSITION OF REINFORCING COATS Russian patent published in 2003 - IPC

FIELD: electrothermics, specifically, equipment for deposition of vacuum ion-plasma coats. SUBSTANCE: reaction chamber has door and branch pipe for connection of vacuum system. Cathode units comprise cathodes and current lead pipes. Each cathode unit has branch pipes to supply and remove water and tube to feed reaction gas located in current lead pipe. Conduit communicating with tube to feed reaction gas is made in cathode in the form of cone facing this tube with vertex. EFFECT: raised utilization factor of reaction gases, decreased heating temperature of parts by ion bombardment, diminished amount of microdrop phase, avoidance of formation of transient zone with columnar structure. 2 dwg