FIELD: machine building.
SUBSTANCE: combined ion-plasma treatment is performed in gas-discharge plasma containing argon ions, followed by diffusion saturation. During the latter, ions of components of solid substance, that makes a part of applied coat, are introduced into has-discharge plasma in magnetron sputtering of target-cathode together with assisting effect of gas-discharge plasma. Transition from diffusion saturation to coat application is carried out by reducing negative shift potential on treated product. In particular cases, gas-discharge plasma, wherein diffusion saturation or coat application is effected, contains argon and nitrogen ions, and is produced by gas plasma generator.
EFFECT: higher wear resistance.
3 cl, 3 ex
| Title | Year | Author | Number | 
|---|---|---|---|
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 | RU2409703C1 | 
| PROCEDURE FOR APPLICATION OF ANTI-FRICTION WEAR RESISTANT COATING ON ITEM OUT OF METAL OR ALLOY | 2008 | 
 | RU2392351C2 | 
| METHOD OF FORMING WEAR RESISTANT COATING ON SURFACE OF STEEL PRODUCTS | 2017 | 
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| METHOD OF COMBINED ION-PLASMA TREATMENT OF PRODUCTS OUT OF ALUMINIUM ALLOYS | 2014 | 
 | RU2566232C1 | 
| APPLICATION OF ANTIFRICTION WEAR-PROOF COAT ON TITANIUM, ALLOYS | 2012 | 
 | RU2502828C1 | 
| ION-PLASMA PRECISION NITRIDING OF METAL PART SURFACE | 2013 | 
 | RU2555692C2 | 
| METHOD OF COMBINED PLASMA SURFACE TREATMENT OF ITEMS FROM TITANIUM ALLOYS | 2017 | 
 | RU2671026C1 | 
| GAS-DISCHARGE SPUTTERING APPARATUS BASED ON PLANAR MAGNETRON WITH ION SOURCE | 2020 | 
 | RU2752334C1 | 
| METHOD OF HARDENING STEEL PRODUCTS | 2016 | 
 | RU2637453C1 | 
| METHOD OF INCREASING RESISTANCE OF METAL CUTTING TOOL | 2018 | 
 | RU2697749C1 | 
Authors
Dates
2009-10-20—Published
2008-01-09—Filed