FIELD: machine building.
SUBSTANCE: combined ion-plasma treatment is performed in gas-discharge plasma containing argon ions, followed by diffusion saturation. During the latter, ions of components of solid substance, that makes a part of applied coat, are introduced into has-discharge plasma in magnetron sputtering of target-cathode together with assisting effect of gas-discharge plasma. Transition from diffusion saturation to coat application is carried out by reducing negative shift potential on treated product. In particular cases, gas-discharge plasma, wherein diffusion saturation or coat application is effected, contains argon and nitrogen ions, and is produced by gas plasma generator.
EFFECT: higher wear resistance.
3 cl, 3 ex
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Authors
Dates
2009-10-20—Published
2008-01-09—Filed