METHOD FOR CONTROLLING ROUGHNESS DEGREE OF ARTICLE SURFACE Russian patent published in 2003 - IPC

FIELD: measuring processes and equipment, namely optical methods for controlling roughness of article surface. SUBSTANCE: method comprises steps of illuminating controlled surface by means of light pulse Tl; passing scattered/reflected irradiation through acoustic-optical modulator in which traveling acoustic pulse Tac propagates. Irradiation stopped down by said acoustic pulse is registered by means of photodetector. It provides synchronized pulse modes of illumination and excitement of above mentioned modulator and possibility for realizing controlled slow detailed scanning of investigated scattered irradiation step by step from one cycle to another. Roughness parameters of article surface are evaluated according to fluctuation of measured parameters of light flux of controlled part and of reference sample. EFFECT: enlarged functional possibilities, improved accuracy of measurements. 3 cl, 4 dwg